由 A Biermanns 著作 — X-ray reflectivity (XRR) is a noncontact, non destructive technique to measure the near surface sturucture of materials. It probes the electron density ...
X-ray reflectivity is a surface-sensitive analytical technique used in chemistry, physics, and materials science to characterize surfaces, thin films and ...
This paper introduces the basic principle, technological progress and applications in advanced semiconductor processes of grazing incidence X-ray reflectivity.
Used to determine thickness, density and roughness for single and multilayer stacks on semiconductor wafers, XRR analysis can be performed on both crystalline ...
由 A Biermanns 著作 — X-ray reflectivity (XRR) is a noncontact, non destructive technique to measure the near surface sturucture of materials. It probes the electron density ...
由 M Yasaka 著作 · 被引用 310 次 — Therefore, the X-rays undergo total reflection when incident on a flat surface of a material at a grazing angle is smaller than the critical angle for total ...
