Piezoelectric micromachined ultrasonic transducer | 私立大學五星教授網

Piezoelectric micromachined ultrasonic transducers (PMUT) are MEMS-based piezoelectric ultrasonic transducers. Unlike bulk piezoelectric transducers which ...

此pMUT能夠經由第一與第二電極間的可壓電變形層產生並且檢測聲波，其囊括形成已懸掛壓電層或膜之(多個)結構化薄膜。頂端電極部乃可操作成用於藉由電信號，經由壓電層之動態 ...

由 K Roy 著作 · 2023 · 被引用 43 次 — PMUTs are micromembrane ultrasound transducers backed by an acoustic cavity that can be nanofabricated in various shapes and dimensions. A ...

由 E Moisello 著作 · 2024 · 被引用 7 次 — This paper presents a review of the state-of-the-art of PMUT and CMUT technologies, focusing on their principle of operation, microfabrication ...

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Piezoelectric micromachined ultrasonic transducers (PMUTs) are MEMS-based piezoelectric ultrasonic transducers for acoustic imaging of the environment.

PMUT: Utilizes a multi-layered piezoelectric thin film to produce and detect acoustic signals. This technology allows for high transmit capabilities and is ...

並且本研究透過有限元素分析法進行模擬，對40kHz 的pMUT 進行了結構參數優化，然後使用標準麥克風進行聲壓測量，以評估pMUT 和pMUT 陣列的性能。 ... 52.2kHz 的諧振頻率下運作 ...